A Review of Tip-based Nanofabrication
From Nanopedia
Huan Hu
ZJU-UIUC Joint Institute, International Campus, Zhejiang University, Haining, Zhejiang 314400, China.
College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
Contents
Introduction
| TBN
technology |
Atom-remove | DPN | tDPN | Thermal
Mechanical |
Thermal-chemical
(TCNL) |
Mechanical
Removal |
Electro-Chemical |
|---|---|---|---|---|---|---|---|
| Lateral
Resolution |
Sun 1nm [15] | 10 nm [16] | 10 nm [17] | Sub 20 nm [18] | 10 nm [19] | 10 nm [20] | 4 nm [21] |
| Speed | 0.4 - 80 nm/s [22] | 0.1 - 4 μm/s [1,23] | 0.1 - 200 μm/s [17, 24] | 20 mm/s [25] - 1.25 m/s [26] | 1 mm/s [19] | 0.1 - 40 μm/s [27] | 0.5 μm/s - 1mm/s [19] |
| Directly
processed material types |
Metal or semiconductors | Biological materials & chemicals | Polymer
& metals with low melting temperatures |
Polymer | Special polymer resist | Metal, semiconductor,
graphene |
Metal, semiconductor,
graphene |
| Vacumm | Ultra-high vacuum
(<10E-9 Torr) |
No | No | No | No | No | No |
| Need
Humidity Control |
No | Yes | No | No | No | No | Yes |
