Difference between revisions of "A Review of Tip-based Nanofabrication"

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__TOC__
 
__TOC__
 
==Introduction==
 
==Introduction==
 +
 +
{| class="wikitable"
 +
! style="text-align: center; font-size:large; font-family:'Times New Roman', Times, serif !important;; background-color:#34cdf9;" | TBN
 +
technology
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | Atom-remove
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | DPN
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | tDPN
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | Thermal
 +
Mechanical
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | Thermal-chemical
 +
(TCNL)
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | Mechanical
 +
Removal
 +
! style="text-align: center; font-size:large; background-color:#34cdf9;" | Electro-Chemical
 +
|-
 +
| style="text-align: center; font-size:medium; background-color:#dae8fc;" | Lateral
 +
Resolution
 +
| style="text-align: center;" | Sun 1nm [15]
 +
| style="text-align: center;" | 10 nm [16]
 +
| style="text-align: center;" | 10 nm [17]
 +
| style="text-align: center;" | Sub 20 nm [18]
 +
| style="text-align: center;" | 10 nm [19]
 +
| style="text-align: center;" | 10 nm [20]
 +
| style="text-align: center;" | 4 nm [21]
 +
|-
 +
| style="text-align: center; font-size:medium; background-color:#dae8fc;" | Speed
 +
| style="text-align: center;" | 0.4 - 80 nm/s [22]
 +
| style="text-align: center;" | 0.1 - 4 μm/s [1,23]
 +
| style="text-align: center;" | 0.1 - 200 μm/s [17, 24]
 +
| style="text-align: center;" | 20 mm/s [25] - 1.25 m/s [26]
 +
| style="text-align: center;" | 1 mm/s [19]
 +
| style="text-align: center;" | 0.1 - 40 μm/s [27]
 +
| 0.5 μm/s - 1mm/s [19]
 +
|-
 +
| style="text-align: center; font-size:medium; background-color:#dae8fc;" | Directly
 +
processed
 +
material
 +
types
 +
| style="text-align: center;" | Metal or semiconductors
 +
| style="text-align: center;" | Biological materials & chemicals
 +
| style="text-align: center;" | Polymer
 +
& metals with
 +
low
 +
melting
 +
temperatures
 +
| style="text-align: center;" | Polymer
 +
| style="text-align: center;" | Special polymer resist
 +
| style="text-align: center;" | Metal, semiconductor,
 +
graphene
 +
| style="text-align: center;" | Metal, semiconductor,
 +
graphene
 +
|-
 +
| style="text-align: center; font-size:medium; background-color:#dae8fc;" | Vacumm
 +
| style="text-align: center;" | Ultra-high vacuum
 +
(<10E-9 Torr)
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
|-
 +
| style="text-align: center; font-size:medium; background-color:#dae8fc;" | Need
 +
Humidity
 +
Control
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | Yes
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | No
 +
| style="text-align: center;" | Yes
 +
|}

Revision as of 16:23, 20 August 2018

Huan Hu

ZJU-UIUC Joint Institute, International Campus, Zhejiang University, Haining, Zhejiang 314400, China.

College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China


Contents

Introduction

TBN

technology

Atom-remove DPN tDPN Thermal

Mechanical

Thermal-chemical

(TCNL)

Mechanical

Removal

Electro-Chemical
Lateral

Resolution

Sun 1nm [15] 10 nm [16] 10 nm [17] Sub 20 nm [18] 10 nm [19] 10 nm [20] 4 nm [21]
Speed 0.4 - 80 nm/s [22] 0.1 - 4 μm/s [1,23] 0.1 - 200 μm/s [17, 24] 20 mm/s [25] - 1.25 m/s [26] 1 mm/s [19] 0.1 - 40 μm/s [27] 0.5 μm/s - 1mm/s [19]
Directly

processed material types

Metal or semiconductors Biological materials & chemicals Polymer

& metals with low melting temperatures

Polymer Special polymer resist Metal, semiconductor,

graphene

Metal, semiconductor,

graphene

Vacumm Ultra-high vacuum

(<10E-9 Torr)

No No No No No No
Need

Humidity Control

No Yes No No No No Yes
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